Technologies

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Ebara Engineering Review No.211

Erosion-resistant Coatings for Pump Impellers developed for the Wanjiazhai Yellow River Diversion Project

by Kenichi SUGIYAMA, Satoshi KAWAMURA, Hiroshi NAGASAKA, Toshiyuki OGAWA, Takayuki NARITA, & Yasuo ASANO

TDeep concern is being directed at the erosion-resistance of pump impellers being operated in Yellow River pumping stations in China. The type of erosion these impellers face are slurry erosion induced by sand impingement and cavitation erosion. As a measure, EBARA has developed methods of predicting volume-loss by slurry erosion. The prediction method features the use of factors such as impingement angle velocity, frequency and impingement particle distribution. As for erosion-resistance, self-flexing alloy coatings have been developed. The following introduces these and discusses test results.

Keywords
Slurry erosion, Cavitation erosion, Thermal spraying, Pump, Impeller, Coating, Anti-erosion materials, Prediction of volume loss, Yellow River, Self-flexing alloy

Development of a Power Generation Unit Driven by Waste Heat (Study on Working Fluids and Expansion Turbines)

by Naoyuki INOUE, Takao TAKEUCHI, Atsushi KANEKO, Tomoyuki UCHIMURA, Kiichi IRIE, & Hiroyoshi WATANABE

A practical power generation unit, made using study results on working fluids and expansion turbines, was tested in the course of developing a simple and compact, waste-heat-driven power generator. A comparative study was made on the characteristics of various working fluids in a low-temperature heat source cycle (evaporation: 77°C& Condensation: 42°C). Study results indicated that TFE, R123, and R245fa were working fluids suitable for the intended power generation cycle. Among these TFE was selected out and a radial turbine was designed and manufactured as a turbine for use with TFE. A power generation experimental apparatus, driven by hot water as the heat source and cooling water as the cooling source, was put together and operated. The generated power was transmitted to the electric utility system via an AC converter. Power generation cycle and expansion turbine characteristics were clarified through tests using the actual power generation unit.

Keywords
Power generator, Waste heat, Ranking cycle, Working fluid, Expander, Radial turbine

Development of an Electron Beam Inspection System (EBeye)

by Kenji TERAO, Tsutomu KARIMATA, & Hiroshi SOBUKAWA

EBARA's EBeye300, a semi-conductor wafer inspection system, applying projection electron microscope technology, is currently undergoing development. A previous report on the same system discussed that the inspection speed of this system could in principle be 3 - 6 times faster than that of a conventional electron beam inspection system (applying scanning electron microscope technology). An actual EBeye300 system based on this design concept was made and used in inspection performance tests on test wafers. The following introduces the geometry of this system, the performance of each component, and performance test results.

Keywords
Defect, Inspection, Semiconductor, Electron beam, Projection, Scanning electron microscope, Pixel size, Yield management, Voltage contrast

Abatement by Dry Reaction of Perfluoro Compounds Gases for Microchip Manufacturing

by Masaaki OSATO, Tadakazu NISHIKAWA, & Yoichi MORI

The Global Warming effect is a problem of worldwide concern and at the Third Conference of the Parties (COP3) to the Framework Convention on Climatic Change (FCCC), held in Kyoto, Japan on December 1997, determination was reached that there was a need to reduce the emission of perfluoro compounds during microchip manufacturing. This so-called Kyoto Protocol started off national and regional engagement towards perfluoro compounds abatement on a worldwide scale. Consequently, fired thermal type and electrical thermal type (including that which uses catalysts) perfluoro compounds containing exhaust gas treatment systems started being used. However, this has led to an increase in the load on wastewater treatment systems of semi-conductor manufacturing plants, as fluorides produced after decomposition are treated using water in such treatment systems. The following introduces a solution to this, a newly developed dry chemical-reaction type exhaust gas treatment system which is capable of high-efficiency perfluoro compound decomposition and which adsorbs decomposed fluorides into adsorbants without releasing them into the wastewater flow.

Keywords
Perfluoro compounds, Global warming effect gas, Chemical reaction type for PFCs, Hydrogen fluoride, Electrical thermal type with catalyst, Fired thermal type, Electrical thermal type, Chemical reaction and physical adsorption type, Wet treatment type, Calcium fluoride

Intellectual Property Related Activities at EBARA CORPORATION

by Kazuyuki SUZUKI

EBARA CORPORATION is now actively engaged in intellectual property related activities to meet current domestic and international intellectual property trends. The following introduces our corporate concepts regarding intellectual property, as well as some chronological factors and results of intellectual property related activities. We feel that enthusiastic engagement in such activities is the key to the sustenance of a 21st Century engineering corporation.

Keywords
Intellectual property, Recent trends, IP strategy, IP organization of EBARA, Action program 2005, Workflow system, Patent map, Skill up