Technologies

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Ebara Engineering Review No.215

LCA for Production of Large-sized Pumps

by Hiroshi KOZUKA, Yasuko ETO, Haruo OKAZAKI, Aiko YOKOSUKA, & Yukiyoshi HATORI

LCA (Life Cycle Assessment) is a method of assessing the life cycle of a product to grasp its environmental impact, from its manufacturing, usage and all the way to its disposal. An LCA database, featuring environmental impact unit data of the supply chain compiled from environmental and production management data from EBARA's Haneda Plant and associate companies, has been created. An LCA system which uses this database for calculating the environmental impact of each product from its specifications has been developed. This system enables easy calculation of environmental impact by custom ordered, large-sized pumps, thus making it possible for us to contribute to environmental protection by offering eco-friendly products. The promotion and implementation of activities for minimizing environmental impact can be done efficiently as the system is capable to reveal problems in each manufacturing process.

Keywords
LCA of product, Database by basic unit, Eco-friendly products, Activities for reducing environmental impact, Supply chain, Global warming potential, Photochemical ozone creation potential, Recycling

Development of a Novel Process for Recovering Phosphorus from Anaerobically Digested Sludge using a Crystallization Reactor

by Kazuaki SHIMAMURA, Asei MIZUOKA, Takao HAGINO, Hideyuki ISHIKAWA, Yuichi FUCHU, & Izumi HIRASAWA

The authors have developed a novel phosphorus recovery process for recovery of MAP (Magnesium Ammonium Phosphate), as well as for separation-recovery of crystallized phosphorus from digested sludge in water treatment plants. The process was developed in an effort to reduce the phosphorus load and increase the MAP recovery amount in water treatment systems. The main components of this process are a complete-mixing type crystallization reactor and a hydro-cyclone. The crystallization phenomenon of phosphorus in digested sludge was studied through a preliminary experiment and conditions for suppressing the generation of micro-crystal MAP determined. A demonstration test using anaerobically digested sludge was carried out using a pilot test system (treatment capacity: 6 m3/day) which was installed in a wastewater treatment plant. Stable MAP recovery, constituting over 30% of T-P in the digested sludge, was achieved through the 6 month duration of the demonstration test, thus demonstrating the practicality of this process.

Keywords
Phosphorus recovery, Crystallization, Magnesium Ammonium Phosphate, Anaerobically digested sludge, Hydrocyclone, Complete mixing, Scale, Eutrophication, Sewage

Cu Planer Plating for CMP Cost Reduction

by Keiichi KURASHINA, Tsutomu NAKADA, & Manabu TSUJIMURA

A novel Cu planer plating technique which enables CMP cost reduction has been proposed and investigated. A finding was made that pressing a porous pad with through-holes against the wafer surface while plating results in the suppression of Cu growth on the field area, as well as a growth of Cu posts only in the through-holes. These Cu posts could be easily and selectively removed by chemical etching, and thus enabling planer Cu plating films with less overburden than that of conventional plating methods. Cu CMP of these films took less time and better step height reduction property could be attained.

Keywords
Plating, Etching, CMP, Semiconductor, Wafer, Copper, Planarity, Overburden, Pad, Porous material

New Pump for Shallow Wells (Model HPA)

by Ryota MIKI, & Masahito KAWAI

A new type pump for use in shallow wells was developed. Some features of this pump are an integrated piping base, a coupling pipe installed at the lower part of the base for communicating three discharge outlets. This design has made it possible to select the direction of discharge from among three outlets. A flow check device, which includes both a flow switch and a check valve, has allowed a reduction in the number of parts, thus making the pump more compact and lightweight (20% reduction in installation space) than conventional models. The exchange of mechanical seals can be done easily by simply sliding the motor backward after loosening the nuts securing it, thus making it unnecessary to remove the pump casing from the unit base for such exchange.

Keywords
Flexibility of installation, Miniaturize, Lightweight, Plural discharge, Maintenance, Flow check, Parts reduction, Shallow wells, stable supply with water, Small scale institution

Compact VOC Bio-treatment System

by Yuzo NARASAKI, Kazuya KONISHI, & Shigeru KOMEKYU

A compact VOC (Volatile Organic Compound) bio-treatment system, requiring no external energy resource and causing minimized impact on the environment, was developed and released into the market. This system, featuring a foreign-made VOC biofilter system, was developed targeting small-to-medium businesses in the printing and paint industries, who need to reduce VOC emission by the year 2010, in compliance to an amendment made in Japan's air pollution prevention law. The usability of this system was confirmed through a one-year pilot test at an actual plant.

Keywords
VOC (Volatile Organic Compounds), Printing•Painting, Biological treatment, VOC concentration, Removal efficiency, Flow rate, Pilot equipment, Field test