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Ebara Engineering Review No.219

Wear Depth Prediction by Slurry Jet Tests on Thermal Sprayed Cermet Layers

by Kenichi SUGIYAMA, & Shuji HATTORI

A novel method of predicting erosion volume loss of SCS6 and thermal sprayed cermet layers by slurry jet tests has been developed, offering a solution for a serious slurry erosion problem caused by sand particles in China's Yellow River Pumping Station. This method allows selection of erosion resistant materials and determination of maintenance sequences. An equation has been compiled which uses analytical results of sand particle behavior and measurement results on surface profiles of 60 μm (mean diameter) silica sand specimens. Prediction by this equation showed an almost perfect match with test results. This equation makes it possible to predict wear patterns of 30 μm (mean diameter) sand. It was also revealed that a threshold value exists as for kinetic energy of colliding particles which contribute to erosion. This threshold value was found to increase in proportion to Vickers hardness.

Keywords
Slurry erosion, Thermal spraying, Pump, Impeller, Prediction of slurry wear, Yellow River, Numerical analysis, Cermet, Slurry jet test, Erosion resistant materials

Remote Monitoring and Failure Diagnosis of a Microturbine Cogeneration System

by Tadashi KATAOKA, Tadahiko KISHIKAWA, Shigeru SAKATA, Takahiro NAKAGAWA, & Jun ISHIGURO

A remote monitoring and failure detection-diagnosis system, capable of high capacity and high speed data acquisition and storage, as well as data sharing via the Internet, has been developed for use in microturbine cogeneration systems. This system enables optimal trouble-shooting and maintenance. Accumulated long-range trend data can also be used to predict the possibility of failure and such, thus enabling preventive measures and maintenance to be carried out accordingly. The operability of a microturbine cogeneration system, which uses this monitoring and diagnosis system, has been reported to exceed 99.5%, indicating that this system is significantly upgrading reliability.

Keywords
Microturbine, Remote monitoring, Failure detection, Failure diagnosis, Predictive maintenance

Estimation on the Probability of Delamination at Low-k Interfaces during CMP Processes

by Yoshihiro MOCHIZUKI, Hideki SHIBATA, Manabu TSUJIMURA, & Hirokuni HIYAMA

An estimation was done on the probability of delamination at low-k interfaces during CMP (Chemical Mechanical Planarization) processes. This was done by carrying out 4-point bending and delamination tests during CMP, mapping the relationship between the two test results in terms of stress distribution in an interconnect structure, and estimating the mechanical property of the device. It was revealed that if the value of Young's modulus of low-k material at the trench part of the interconnect structure is above a certain value, an extremely low CMP downforce becomes unnecessary. It was also revealed that the combination of material is an important factor for reducing delamination.

Keywords
Chemical Mechanical Planarization, Low-k material, Delamination, Finite element method, Fracture mechanics

PFC-containing Waste Gas Treatment Methods and Evaluation on Abatement Efficiency

by Yoichi MORI, Takashi KYOTANI, & Yasuhiko SUZUKI

Characteristics of PFC-containing waste gas treatment systems and evaluation on abatement efficiency are discussed. The discussed systems and evaluation methods are significantly contributing in reducting PFC gas emission, especially in the microchip manufacturing industry. Such reduction is crucial in creating a hazardous-gas-free work environment and more important, in minimizing the global warming effect.

Keywords
Perfluoro Compounds, Fired thermal type, Electrical thermal type with catalyst, Chemical reaction type for PFCs, Fourier transform infrared spectroscopy, Gas chromatography mass spectrometry, Quadrupole mass spectrometry, Abatement efficency, Waste gas treatment system, Analysis method

Pump System for Shirone Pump Station

by Ryoji OTAKE, & Yoshikatsu YAMAMOTO

Manufacturing and installation of pump equipment, including electrical equipment, had been completed for modifying Shirone Pumping Station. This modification was done as a measure against land subsidence and for improving the reliability of pumping operations. As for the measure against land subsidence, a flexible base was constructed for the main pumps. Reliability was improved by the use of non-water-injected pumps, air cooled reduction gears, and gas turbines as prime movers for flood control. The cooling system was simplified and the air-cooling of the reduction gears was enabled by installing a radiator cooling system inside the ventilation duct. A touch panel was implemented for remotely switching over the operation of pumps in the old pump house to those in the new pump house.

Keywords
Drainage pump station, Subsidence, Simplification, Flexible base, Gas turbine

Examples of High Temperature Corrosion in Energy Conversion Systems of Waste Treatment Facilities

by Manabu NOGUCHI, Hiroshi YAKUWA, & Matsuho MIYASAKA

Causes of and measures against high temperature corrosion in energy conversion systems of waste treatment facilities, including incinerators, stokers, boilers and gasification systems, are revealed and discussed. Actual examples and corrosion-resistant materials and methods are introduced. Such knowledge on high temperature corrosion is an important factor in evaluating the durability of materials used in energy conversion systems and leads to an upgrade in cost-and energy-efficiencies.

Keywords
High temperature corrosion, Incinerator, Gasifier, Fluidized bed, Super heater, Stoker, Erosion-corrosion