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Ebara Engineering Review No.233

Centralized Monitoring System for Semiconductor Manufacturing Plant

by Koichi KIDO

A novel centralized monitoring system has been developed for dry vacuum pumps and waste gas abatement systems used in semiconductor manufacturing plants. This system, comprising a telecommunication adaptor, a data collection/storage personal computer and a server, can link up to 1200 monitoring units and collects data from all monitoring units every 1 second. The user can log in to the system via an internet browser from his personal computer, access real time situations, trends from collected data, and equipment chronological data, and also send warnings of irregularities by E-mail. All these functions can be operated remotely.

Centralized monitoring system, Dry vacuum pump, Gas abatement system, Semiconductor manufacturing plant, Network, Intranet, Internet, E-mail

Runoff Rainwater Pumps and Auxiliary Equipment for the Nakahama Sewage Plant, Osaka City

by Yousuke SHOUJI, Wataru ITOU, & Mitsutoshi HAGINO

Ebara's runoff rainwater pump (φ 1800 mm vertical volute, mixed-flow type) system has been installed 34 m below ground level at Osaka City's Nakahama Sewage Plant to cope with sudden rapid influx of rainwater. This pump is capable of high speed drainage, as well as a low speed standby operation. Its design includes resonance prevention worked out from vibration analysis results, including those on the motor and its reducer, considering the wide range of pump speed control. Noise prevention and reduction has been realized by use of a gas turbine power generator as the motor's power source. Another feature for minimizing the impact on the environment would be the spraying of pure water on the gas turbine engine combustor for inhibiting the generation of nitrogen oxides.

Drainage pumping station, Vertical volute type mixed flow pump, Speed control, In-pipe heat exchanger, Gas turbine generator

Novel Absorption Chiller System for Air-conditioning a Large-scale Plant

by Sadayoshi TAKAHASHI & Pairoj SAENGTHONG

A cold-heat-source system, featuring a new type steam-absorption chiller, had been delivered to a large-scale plant located in the suburbs of Bangkok, Thailand. This was a follow-up of a delivery of 3 sets of model RAW ("Model RAW" in this Ebara Engineering Review is Ebara Refrigeration Equipment & System Co., Ltd.'s model code) 3516 kW steam-absorption chillers completed in November 2006. The new steam-absorption chiller (4571 kW) system, highly efficient and energy saving (high COP as an absorption type chiller: up to 1.38 for a single unit), sufficiently satisfied the client's plant modification requirements and specifications. An increase in the demand for this non-CFC using system, whose environmental impact is minimized as such, is looked forward to.

High efficiency, Steam absorption chiller, Energy saving, Coefficient of Perormance, Evaporator, Cold heat loss, Reduction in construction cost, Chilledwater storage tank, Cooling load, Maintenance and modification

The HPCC21 Stoker and Prospects for the Development of Waste to Energy Technology

by Teruaki TSUKAMOTO, Kiyoyuki SAKURAI, Tetsuji IGUCHI, Takehiro OKA, Minoru SASAKI, & Junichi ICHIKAWA

Circumstances regarding the treatment of municipal solid waste have undergone drastic changes in the last 2 decades. The technology demanded in such treatment is also undergoing changes and includes factors such as efficient energy use, reduction in dioxin emission, reduction in final waste disposal amounts and slag melting techniques, as well as the reuse of waste as a resource. Corresponding measures and policies have also caused changes in the properties of waste to be treated and the public demand in waste treatment processes. Ebara Environmental Plant Co., Ltd. has made effective use of its abundant experience in the field and its exquisite technological expertise to develop the HPCC21 (High Pressure Combustion Control 21) type stoker, capable of versatile and safe municipal waste treatment. Its stable operation has been proven and it fulfills the diversified demands in present and future waste treatment. Concepts and the element technology encompassing the HPCC21 type stoker are introduced and discussed in the following.

Municipal solid waste, Incinerator, Stoker, Fire grate, Auto combustion control, Gas treatment, Waste to energy, Forcible air-cooling