2018.05.30
EBARA CORPORATION
The150,000 dry vacuum pump
The Precision Machinery Company of Ebara Corporation (“EBARA”) has achieved 150,000 units Cumulative shipments of dry vacuum pumps from the Fujisawa Plant in May 2018. This accomplishment is the result of our effort over the last 32years since the shipment of the first unit in 1986.
Semiconductor used for all sorts of electronics products were once referred to as the “key element in the industrial world.” Until the 1980’s, the majority of vacuum pumps used for semiconductor manufacturing processes were oil rotary vacuum pumps. With an increase in highly integrated circuits, EBARA commercialized dry vacuum pumps that employ our core competence, rotary machinery technology, and non-contact seal design to prevent lubricant migration, with the aim of meeting the increasing demand for cleaner vacuum environments from the total power consumed at manufacturing plants in the rapidly-growing semiconductor industry. Producing clean vacuum, EBARA’s dry vacuum pumps are characterized by a non-contact sealing structure that reduces the frequency of maintenance. This feature has broadened their applications from manufacturing of semiconductors and displays to the production of solar cells, LEDs, lithium-ion secondary batteries and various kinds of analyzers.
EBARA will continue to meet demands in the steadily growing semiconductor market and various customer’s demand by starting a fully automated plant for dry vacuum pumps by 2019 based on the measures of Medium‐Term Management Plan E-Plan2019, which will dramatically improve production efficiency, and by deepening its cooperation with overseas production sites.
-History of dry vacuum pumps at EBARA -
| 1985 | The development of dry vacuum pumps started |
| 1986 | Launched roots dry vacuum pumps |
| 1989 | Completed the construction of the V2 factory for mass production of dry vacuum pumps |
| 1991 | Launched Model A standard pump packages |
| 1994 | The cumulative shipments from the Fujisawa Plant reached 10,000 units |
| 1995 | Launched Model AA energy saving dry vacuum pumps |
| 1997 | Launched Model AAS screw type dry vacuum pumps for heavy load processes |
| 1998 | Model AA70W won the “Japan Society of Industrial Machinery Manufacturers Prize” at the Machine Design Award sponsored by the Nikkan Kogyo Shimbun, Ltd. |
| 2000 | Model AA Dry vacuum pump awarded for the 20th Agency for Natural Resources and Energy Director-General’s Prize |
| 2003 | Launched Model ESR energy saving dry vacuum pump |
| 2004 | Launched Model EST screw dry vacuum pump for heavy duty applications Launched Model ESA roots dry vacuum pump for large volume exhaust |
| 2007 | Model ESR won the “Japan Machinery Federation Chairman’s Prize” at the 27th Excellent Energy Saving Equipment Award sponsored by the Japan Machinery Federation. |
| 2009 | Launched Model EV-S energy saving dry vacuum pump Launched model PDV air-cooled dry vacuum pump |
| 2011 | Launched model EV-M dry vacuum pump for heavy duty applications The cumulative shipments from the Fujisawa Plant reached 100,000units |
| 2012 | Launched model EV-A air cooled dry vacuum pump |
| 2013 | Launched model EV-SA air cooled dry vacuum pump for analytical instruments and electronic microscope |
| 2016 | Launched model EV-L energy saving dry vacuum pump for medium-duty applications |
| 2018 | The cumulative shipments from the Fujisawa Plant reached 150,000units |
Masao Asami, President of the Precision Machinery Company of Ebara Corporation at the ceremony