News & Media

Components Development and Innovation Center, V6 Bldg. in Fujisawa

July 10, 2019

Exterior of Components Development and Innovation Center

EBARA CORPORATION (“EBARA”) held the completion ceremony for the newly built Components Development and Innovation Center, to play an integral role in the advanced development and testing of next generation dry vacuum pumps and gas abatement systems, which are the core products of EBARA Precision Machinery Business. The facility is scheduled to start full operation from October 1, 2019.

1. Background and Purpose
Amid the advancement of the Internet of Things (IoT) and artificial intelligence (AI), semiconductors are being used for a wider range of applications. Correspondingly the demand for advanced semiconductor manufacturing equipment is also on an upward trend. Next generation dry vacuum pumps and gas abatement systems to support such semiconductor manufacturing equipment and advanced research and development equipment in various industries are also becoming a key market requirement. Under these circumstances, EBARA has established a center for advanced development and innovation in order to respond efficiently to customer needs.

2. Features of V6 Building
・The floor area and the number of test benches (test stands) is more than double compared with the existing test equipment
・Equipped with process gas introduction and treatment equipment that reproduces the operating environment for customers
・Equipped with a demonstration room that enables customers to witness the operation of new products
・Custom configuration for integrated testing and operation of both dry vacuum pumps and gas abatement systems in one location
・The test data measurement system using IoT technology is adopted
・Equipped with a meeting space where both employees and customers and collaborate on new ideas and technologies.

3. Future Developments
EBARA strives to enhance the research and development activities for dry vacuum pumps and gas abatement systems thru streamlined processes and state-of-the art infrastructure. We have undertaken various initiatives with the goal being to compress the product development cycle so as to release competitive market ready products that meet our customers’ requirements in a timely manner. We will also focus on the development of integrated systems that combine our various independent products such as abatement systems and dry vacuum pumps, since there is a growing demand from the market for such product offerings.

4. Overview
Location: 4-2-1 Honfujisawa, Fujisawa-shi Kanagawa 251-8502, Japan
Facilities: Components Development and Innovation lab for dry vacuum pumps and gas abatement systems
Building area: Approx. 2,245 m2; two stories above ground
Building cost: About 1 billion yen

The EBARA Group strives to achieve its management policy and further enhance its corporate value based on its medium-term management plan. We achieve the Sustainable Development Goals (SDGs) by tackling ESG issues.

Minimize the amount of energy and resources used in production activities