Increase productivity with cutting-edge vacuum technology
Reassuring global support
Enhancement of production processes with automated plant
Support business maintenance with highly reliable devices
"EBARA’s Precision Machinery Company is a leader in vacuum and planarization technologies, supporting electronic manufacturing sites with the industry’s most advanced technologies.
EBARA supplies various products worldwide, including Chemical Mechanical Polishing Systems, CMP, which are imperative for semiconductor manufacturing, dry vacuum pumps, exhaust abatement systems, and ozonized water generators. These products are being adopted widely in various fields thanks to their high performance, reliability, and secure support systems. EBARA's products perform not only in the semiconductor field but also in other related industries such as the chemical, pharmaceutical, and research and development applications.
Semiconductors support a wide range of devices that are indispensable in everyday life. EBARA’s products are used in various processes that are essential to semiconductor manufacturing.
Our dry vacuum pumps play an active role in conjunction with different types of analyzers, including mass spectrometers, gas chromatography, and electron microscopes.
Leakage testing is widely used to detect leakages in sealed containers such as pharmaceutical packaging, heat exchangers used in refrigerators and air conditioners, and industrial vacuum machining equipment. EBARA’s dry vacuum pumps help to increase the reliability of these sealed containers.
Coating is used in various fields, including for industrial products, accessories, and optical components. EBARA’s dry vacuum pumps play an active part in the application of high-quality coating.
What are Dry Vacuum Pumps?
Our dry vacuum pumps, with noncontact construction, are indispensable in building clean vacuum environments. They play an active role in many different fields, particularly semiconductor manufacturing processes.
What is semiconductor manufacturing equipment?
EBARA manufactures high throughput CMP systems, bevel polishing systems with superior polishing performance, and plating systems that allow flexible configurations, which are essential in the manufacture of precision, highly integrated semiconductors. EBARA supplies semiconductor manufacturing equipment to the world’s major semiconductor manufacturers.
What are Exhaust Abatement Systems?
Exhaust abatement systems are abatement systems that detoxify the harmful gases generated in manufacturing processes, such as perfluorocarbons (PFCs), toxic gases, and VOCs, and release them into the atmosphere. EBARA’s exhaust abatement systems can treat even PFCs, which are difficult to abate, with high efficiency.
What are Ozonized Water Generators?
Ozonized water is a powerful oxidizing agent obtained by dissolving ozone (O3) into water. EBARA’s ozonized water generators are able to produce ozonized water at high concentrations and with high concentration stability. They contribute to the improvement of processing efficiency and purity.
Dry Vacuum Pump Model EV-PA
Small, lightweight, and energy-saving air-cooled pump
High process performance and reliability
Exhaust Abatement System Model TND
Achieves low NOx, low CO emissions and highly efficient exhaust gas treatment
Ozonized Water Generator Model OZW
Generates highly concentrated ozonized water with high concentration stability
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