Harmful gases are generated in the manufacturing processes of various products, such as chemicals, materials, and electronic components. Gas abatement systems use a variety of methods, including combustion and catalysis, to detoxify harmful gases. Demand has been growing for gas abatement systems in recent years from the perspective of environmental protection.
EBARA offers an extensive range of gas abatement systems to suit the different types of gases to be treated and the environment of use. They include combustion models that are able to treat multiple flammable gases at a time with high efficiency, and dry models that eliminate the need for fuel supply and the disposal of wastewater. Our systems are in use in a variety of industries, including semiconductor manufacture.
Gas abatement systems
model TND
Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.
model G5
Combustion-type exhaust abatement system that offers highly efficient treatment of flammable gases and perfluorocarbons (PFCs).
model FDS
Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing.
model GT
Dry abatement system for treatment of hazardous substances such as arsenic and phosphorous without need for water scrubbing.
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