Synchrotron radiation is used for research and development in various fields, from basic sciences such as life sciences and space science, to industrial fields such as medical, biotechnology, and industrial products. High vacuum and ultra-high vacuum are used for accelerators and storage rings that generate synchrotron radiation and for beamlines that bring synchrotron radiation to the samples. EBARA’s dry vacuum pumps offer excellent extraction performance even on hydrogen gas, which is difficult to expel, and are suitable as a back-up pump for turbomolecular pumps to create ultra-high vacuum.
Dry Vacuum Pumps
model EV-PA
Air-cooled dry vacuum pump with low power consumption.
model EMT/model EBT
Ultra-high vacuum turbomolecular pumps.
model ESA
Dry vacuum pump suitable for pumping light gases such as hydrogen.
model EV-A10
Compact air-cooled model.
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