Semiconductor technology supports a wide range of devices essential for everyday life, including computers, smartphones, home appliances, vehicles, and medical equipment. The degree of precision of semiconductor manufacturing processes is advancing day by day, and processing equipment needs to deliver machining precision at the nanometer level. High-precision machining equipment, which is manufactured by combining various advanced technologies, supports the evolution of semiconductors.
EBARA’s semiconductor manufacturing equipment, which is equipped with cutting-edge technologies and certain reliability, contributes to increased productivity in semiconductor manufacturing. We support the evolution of semiconductor technology with cutting-edge technical capabilities and reassuring support systems. Our diverse product lineup includes CMP systems whose unique construction delivers high operating rates and throughput, flexible bevel polishing equipment that offers high-performance polishing and defect removal performance, and plating systems that allow system configuration with high throughput and flexibility.
Examples of the use of EBARA’s semiconductor manufacturing equipment:
Semiconductor device manufacture
Semiconductor devices used in products such as computers, smartphones, home appliances, vehicles, and medical equipment.
Application examples
Model F-REX300XA
Highly reliable CMP system with EBARA’s highest production efficiency ever.
Model F-REX
High performance, high throughput for high productivity
Model EAC
Fixed abrasive for excellent polish/removal performance, edge control function
Model UFP600AS
Achieves both high-throughput, high-speed plating and superior uniformity performance
Product lineup
Sales Office Information
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