Magnetic Levitated Type / Ball Bearing Type
Suitable for a wide range of exhaust speeds from 340 to 4,200 L/min. Integrated controller types and air-cooling/water-cooling types are available.
model EV-PA
Air-cooled dry vacuum pump with low power consumption. Light-weight and compact model.
model EV-A10
Dry vacuum pump ideal for pumping performance around atmospheric pressure. Compact air-cooled model.
model EV-SA
Dry vacuum pump for exhaust speeds of up to 5,000 L/m. Compact, air-cooled model.
model ESA
Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.