Low power consumption
Corrosion resistant material options
Identical pumping performance regardless of frequency (50/60 Hz)
Oil-free
CE marking/SEMI-S2/NRTL available
With EBARA’s unique rotor design and idling function, the Model ESR range achieves low power consumption and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.
| Model | Unit | ESR20N | ESR30 | ESR30N | ESR500W(N) | |
| Pumping Speed | L/min | 1,300 ~ 2,000 | 3,000 | 3,000 | 46,000 | |
| Ultimate Pressure | Pa | 2.0 | 0.53 | 0.67 | 0.2 | |
| Connection | Inlet | NW40 | NW50 | NW50 | ISO160 | |
| Outlet | NW40 | NW40 | NW40 | NW40 | ||
| Approx. Power at Ultimate Pressure | kW | 0.7 | 1.7 | 1.7 | 3.1 | |
| Cooling water | Flow rate | L/min | 2~8 | 3.5~8 | 3.5~8 | 3.5~8 |
| Temperature | ℃ | Max. 30 | Max. 30 | Max. 30 | Max. 30 | |
| N2 | Flow rate | Pa•m3/s | 19~22 (0) | 19~22 (3.4) | 19~22 (3.4) | 19~22 (3.4) |
| Power Supply Phase/Volt/Freq. |
200V Models | 3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
|
| 400V Models | 3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
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| Power capacity | kVA | 4.0 | 7.0 | 7.0 | 12.3 | |
| Weight | kg | 90 | 190 | 190 | 500 | |
model EV-M
Dry vacuum pump with low power consumption, ideal for performance for high-load applications
model EV-S
Dry vacuum pump with low power consumption and small footprint
Integrated dry vacuum pump/gas abatement systems
Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs