High-temperature operation control
High exhaust speeds
Large pumping volumes
Corrosion resistant materials employed as standard
Enhanced corrosion resistant options
High-load applications
Identical pumping performance regardless of frequency (50/60 Hz)
Oil-free
CE marking/SEMI-S2/NRTL available
The Model EST range uses a screw-type rotor and is equipped with a high-temperature operation function to maintain gas in the pump at high temperatures. Best suited for applications where reaction byproducts are generated, such as CVD. With corrosion resistant materials employed as standard, this model achieves high exhaust speeds and large pumping volumes and contributes to process efficiency by curbing downtime.
| Model | Unit | EST10N | EST25N | EST100WN | EST200WN | EST300WN | EST500WN | EST800WN | |
| Pumping Speed | L/min | 1,000 | 2,500 | 10,000 | 20,000 | 30,000 | 50,000 | 80,000 | |
| Ultimate Pressure | Pa | 2.7 | 0.4 | 0.4 | 0.4 | 0.4 | 0.4 | 0.5 | |
| Connection | Inlet | NW40 | NW40 | NW50 | NW100 | NW100 | ISO160 | ISO200 | |
| Outlet | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | ||
| Approx. Power at Ultimate Pressure | kW | 2.3 | 3 | 3.2 | 3.2 | 4.5 | 4.6 | 4.6 | |
| Cooling water | Flow rate | L/min | 5~8 | 5~8 | 5~8 | 5~8 | 5~8 | 5~8 | 5~8 |
| Temperature | ℃ | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | |
| N2 | Flow rate | Pa•m3/s | 13~18 | 13~18 | 24~29 | 24~29 | 28~31 | 28~31 | 28~31 |
| Power Supply Phase/Volt/Freq. |
200V Models | 3-phase/200-220V,50/60Hz | 3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
|
| 400V Models | 3-phase/380-440V,50/60Hz | 3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
- | ||
| Power capacity | kVA | 4.6 | 7.3 | 8.2 | 8.5 | 12.7 | 15.1 | 16.0 | |
| Weight | kg | 260 | 300 | 380 | 430 | 500 | 550 | 840 | |
model ESR
Dry vacuum pump with low power consumption, suitable for corrosive process applications
model ESA
Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.
model EV-M
Dry vacuum pump with low power consumption, ideal for performance for high-load applications
Integrated dry vacuum pump/gas abatement systems
Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs