High-load applications
High-temperature operation control
Low power consumption
Corrosion resistant materials employed as standard
Enhanced corrosion resistant options
Identical pumping performance regardless of frequency (50/60 Hz)
Oil-free
CE marking/SEMI-S2/NRTL available
With EBARA’s unique heat-resistance technology, the Model EV-M range is designed for high-load applications where large volumes of reaction byproducts are generated in semiconductor, liquid crystal, and solar cell manufacturing processes. With its outstanding power consumption performance, the Model EV-M range has mastered the balance between resistance to high-load applications and energy efficiency. Robust anti-corrosion materials are employed as standard. A large-capacity model offering a pumping rate of 110,000 L/min is also available. The extensive product line-up caters to a wide range of high-load applications to match process conditions.
| Ultimate Pressure | Unit | EV-M20N | EV-M102N | EV-M202N | EV-M302N | EV-M502N | EV-M505SF | EV-M802N | EV-M805SF | EV-M1205SF | |
| Pumping Speed | L/min | 1,800 | 10,000 | 20,000 | 30,000 | 50,000 | 50,000 | 80,000 | 80,000 | 110,000 | |
| Ultimate Pressure | Pa | 5.0 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | |
| Connection | Inlet | NW40 | ISO100 | ISO100 | ISO100 | ISO160 | ISO160 | ISO200 | ISO200 | ISO200 | |
| Outlet | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | NW40 | ||
| Approx. Power at Ultimate Pressure | kW | 1.2 | 1.8 | 1.9 | 2.3 | 2.1 | 3.9 | 2.8 | 4.6 | 5.3 | |
| Cooling water | Flow rate | L/min | 3~8 | 3~8 | 3.5~8 | 4~8 | 5~8 | 5~8 | 5~8 | 5~8 | 5~8 |
| Temperature | ℃ | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | |
| N2 | Flow rate | Pa•m3/s | 26~31 | 26~31 | 26~31 | 26~31 | 28~33 | 228 | 28~33 | 228 | 34~35 |
| Power Supply Phase/Volt/Freq. |
200V Models | 3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
3-phase/200V/50Hz 3-phase/200-220V/60Hz |
|
| 400V Models | 3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
- | 3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
3-phase/380-400V/50Hz 3-phase/380-440V/60Hz |
||
| Power capacity | kVA | 3.3 | 5.4 | 6.0 | 6.8 | 7.1 | 15.7 | 8.3 | 19.4 | 14.2 | |
| Weight | kg | 170 | 320 | 360 | 400 | 500 | 580 | 740 | 820 | 870 | |
model EST
Dry vacuum pump suitable for handling reaction byproducts and for fast pump-down requirements in large-volume chambers
model ESR
Dry vacuum pump with low power consumption, suitable for corrosive process applications
Integrated dry vacuum pump/gas abatement systems
Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs