Low power consumption
Compact and light weight
Air-cooled type
Can be used with single-phase 100 V – 240 V power supply
No seal replacement free, long product life
Low noise
Oil-free
Identical pumping performance regardless of frequency (50/60 Hz)
CE marking/SEMI-S2/NRTL available
Requiring no coolant water, only electric power source is required. Can be used with single-phase 100 V – 240 V power supply.
| Model | Unit | EV-PA250 | EV-PA500 | |
| Pumping Speed(Gas ballast: On) | L/min | 230 (200) | 500 (430) | |
| Ultimate Pressure | Pa | 0.5 (2.0)* | 0.5 (2.0)* | |
| Connection | Inlet | NW25 | NW25 | |
| Outlet | NW25 | NW25 | ||
| Approx. Power at Ultimate Pressure | kW | 0.24 (0.38) | 0.27 (0.6) | |
| Cooling system | Air cooled | Air cooled | ||
| Power Supply | Rated voltage 50/60 Hz | Single-phase 100-230V | Single-phase 100-230V | |
| Permissible voltage fluctuation | ±10% | ±10% | ||
| Power capacity | kVA | 0.45 | 0.66 | |
| Weight | kg | 16 | 21 | |
| *Gas ballast: On | ||||
model EV-SA
Dry vacuum pump for exhaust speeds of up to 5,000 L/m. Compact, air-cooled model.
model EV-A10
Dry vacuum pump ideal for pumping performance around atmospheric pressure. Compact air-cooled model.
model EMT/model EBT
Ultra-high vacuum turbomolecular pumps
model ESA
Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.