Low power consumption
Compact and light weight
Corrosion resistant material options
N2 purge model option available
Identical pumping performance regardless of frequency (50/60 Hz)
Oil-free
CE marking/SEMI-S2/NRTL available
With EBARA’s unique rotor design and idling function, the Model EV-S range achieves world-class energy efficiency and a small footprint. Helps to reduce running costs. With enhanced corrosion resistance options available, this model offers a wide range of applications from light-load processes such as load-lock and SEM to corrosive processes.
| Model | Unit | EV-S20 | EV-S20P/N | EV-S30 | EV-S30P | EV-S50 | EV-S50P/N | EV-S100 | EV-S100P/N | EV-S200 | EV-S200P/N | |
| Pumping Speed | L/min | 1,670 | 1,670 | 3,300 | 3,300 | 5,000 | 5,000 | 10,000 | 10,000 | 20,000 | 20,000 | |
| Ultimate Pressure | Pa | 3 | 5 | 0.5 | 1.0 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | |
| Connection | Inlet | NW50 | NW50 | NW50 | NW50 | NW50 | NW50 | NW80 | NW80 | NW100 | NW100 | |
| Outlet | NW25 | NW25 | NW25 | NW25 | NW25 | NW25 | NW25 | NW25 | NW40 | NW40 | ||
| Approx. Power at Ultimate Pressure | kW | 0.4 | 0.4 | 0.4 | 0.4 | 0.55 | 0.55 | 0.65 | 0.65 | 0.75 | 0.75 | |
| Cooling water | Flow rate | L/min | 1.5~3.0 | 1.5~3.0 | 1.5~3.0 | 1.5~3.0 | 2.0~3.0 | 2.0~3.0 | 2.0~3.0 | 2.0~3.0 | 2.0~3.0 | 2.0~3.0 |
| Temperature | ℃ | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | Max. 30 | |
| N2 | Flow rate | Pa•m3/s | - | 17～20 (2.4) | - | 17～20 (2.4) | 17～20 (2.4) | 17～20 (2.4) | 17～20 (2.4) | |||
| Power Supply Phase/Volt/Freq. |
200V Models | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | 3-phase/200-220V,50/60Hz | |
| 400V Models | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | - | - | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | 3-phase/380-440V,50/60Hz | ||
| Power capacity | kVA | 3.2 | 3.2 | 3.6 | 3.6 | 4.8 | 4.8 | 6.4 | 6.4 | 6.8 | 6.8 | |
| Weight | kg | 60 | 60 | 90 | 90 | 100 | 100 | 120 | 120 | 170 | 170 | |
| *Specifications are examples only. They may vary depending on the model, so please inquire for details. *Contact us for details. |
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model ESA
Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.
model EV-SA
Dry vacuum pump for exhaust speeds of up to 5,000 L/m. Compact, air-cooled model.
Integrated dry vacuum pump/gas abatement systems
Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs