Suitable for mediumduty processes
Suitable for high-temperature control
Energy saving
Reduced footprint
Corrosion-resistant materials
Option for increased corrosion resistance
Same performance with different frequencies (50 Hz/60 Hz)
Oil-Free
CE marking/SEMI-S2/NRTL
This dry vacuum pump is for medium duty processes, equipped with Ebara's unique energy-saving technology, adopting a module design optimized for manufacturing in automated plants and realizing further miniaturization and energy saving.
With wide-range temperature control capability it extends the applicable processes. The same model can cover multiple processes; therefore, spare machine inventory can be optimized, maintenance and training can be reduced and processes can be expanded flexibly in the future. In addition, process resistance is improved by optimum temperature control for each process, and TCoO is reduced by extending the replacement cycle of parts.
Applicable applications include various etching and CVD, ashing, ion implantation, epitaxy, etc.
Model EV-S
Dry vacuum pump with low power consumption and small footprint
Model EV-M
Dry vacuum pump with low power consumption, ideal for performance for high-load applications
Model EST
Dry vacuum pump suitable for handling reaction byproducts and for fast pump-down requirements in large-volume chambers
Integrated dry vacuum pump/gas abatement systems
Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs