model G6-E | EBARA CORPORATION

Model	Unit	G6-E A1~A4	G6-E P1~P4
Abatement method		burn+ wet	burn+ wet
Max. inflow gas volume	L/min	400	400
Fuel		City gas	Propane gas
Dimensions	W x D x H mm	1,200×650×1,900mm	1,200×650×1,900mm
H₂ abatement	L/min	200	200
Gases (e.g.)		Process (depo) gases H2, PH3, Si3H8, SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc.	Process (depo) gases H2, PH3, Si3H8, SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc.
Standard equipment		Large flow-rate H2 abatement burner	Large flow-rate H2 abatement burner
Standard equipment		Burner scraper for powder removal	Burner scraper for powder removal
Options		City water/drainage consumption reduction unit	City water/drainage consumption reduction unit
Options		Fan scrubber for reduction of powder emissions	Fan scrubber for reduction of powder emissions

Specifications