Catalysis-type exhaust abatement system
Low power consumption
Highly efficient abatement of PFC gases
No fuel required
Low maintenance costs
Model GCR is a catalysis-type exhaust abatement system that efficiently decomposes and removes gases, including PFC gases such as CF4 used for etching oxide semiconductor films, at low running costs.
| Model | Unit | GCR120* | GCR250 |
| Abatement method | catalytic + wet | catalytic + wet | |
| Max. inflow gas volume | L/min | 120 | 250 |
| Reactor life detector | PFC detector | PFC detector | |
| Dimensions | W x D x H mm | 1,200×600×1,800mm | 1,400×700×1,850mm |
| Gases | CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. | CF4, C2F6, C3F8, CHF3, SF6, C5F8, C4F6, NF3, HF, F2, SiF4, CO, COF2, N2O, etc. | |
| *Discontinued products | |||
model FDS
Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing
model TND
Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.