Model	Unit	GTE-3-0	GTE-0-2	GTC-1-0	GTC-2-0	GTC-6-0	GTC-0-1
Abatement method		Dry	Dry	Dry	Dry	Dry	Dry
Gases		HBr, Cl2, BCl3, F2, SiF4, HF, COF2, C5F8, C4F6, etc.	NF3, N2O, NO, NO2, SiF4, HF, F2, etc.	SiH4, PH3, AsH3, TMS, etc.	NH3, SiH2Cl2, SiCl4, etc.	TEOS, TMB, TME, O3, etc.	ClF3, HF, F2, HCl, etc.
Max. inflow gas volume	L/min	100	80	100	100	100	100
Dimension Single	W x D x H mm	600x600x2,000	900x600x2,000	600x600x2,000	600x600x2,000	600x600x2,000	600x600x2,000
Dual	W x D x H mm	900x600x2,000	-	900x600x2,000	900x600x2,000	900x600x2,000	900x600x2,000