Combustion-type exhaust abatement systems
Low NOx and low CO emissions
Batch treatment of multiple gas types
Highly efficient abatement of PFCs
Byproduct removal measures/automatic removal of powdery byproducts
Wet-burn-wet model available
Long maintenance intervals
Low running cost
The Model TND range is a combustion-type exhaust abatement system that uses a unique combustion system to achieve low NOx and low CO emissions. A variety of corrosion and byproduct countermeasures achieves maintenance intervals that are three times longer than conventional products. Lower cost operation is also possible with the low utility consumption that provides reduced running costs. The range includes the Model TND-Single (burn+ wet) and the Model TND-Single Plus (wet + burn + wet). This range achieves low running costs and highly efficient abatement even for processes with high byproduct generation.
| Model | Unit | TND-Single A1-A4/ TND-Single P1~P4 | TND-Single Plus-A1~A4/P1~P4 |
| Abatement method | burn+ wet | wet + burn + wet | |
| Max. inflow gas volume | L/min | 200(per port） | 200(per port） |
| 400(per burner） | 400(per burner） | ||
| Fuel | City gas or propane gas | City gas or propane gas | |
| Dimensions | W x D x H mm | 1,200 x 650 x 1,980 | 1,200 x 650 x 1,980 |
| Gases (e.g.) | Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. |
Process (depo) gases WF6, TiCl4, SiH4, PH3, GeH4, NH3, SiH2Cl2, TEOS, B2H6, H2, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. PFCs CF4, C2F6, C3F8, CHF3, SF6, etc. |
|
| Standard equipment | Washing mechanism for powder removal | Powder filtering mechanism | |
| Burner scraper for powder removal | Burner scraper for powder removal | ||
| Options | City water/drainage consumption reduction unit | City water/drainage consumption reduction unit | |
| Fan scrubber for reduction of powder emissions | Fan scrubber for reduction of powder emissions | ||
model G5
Combustion-type exhaust abatement system that offers highly efficient treatment of flammable gases and perfluorocarbons (PFCs)
model G6
Combustion-type exhaust abatement system for large flow volumes of up to 1,200 L/min
model FDS
Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing
Integrated dry vacuum pump/gas abatement systems
Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs