기기명		단위	EV-M20N	EV-M102N	EV-M202N	EV-M302N	EV-M502N	EV-M505SF	EV-M802N	EV-M805SF	EV-M1205SF
배기 속도		L/min	1,800	10,000	20,000	30,000	50,000	50,000	80,000	80,000	110,000
도달 압력		Pa	5.0	0.5	0.5	0.5	0.5	0.5	0.5	0.5	0.5
접속구경	흡기구		NW40	ISO100	ISO100	ISO100	ISO160	ISO160	ISO200	ISO200	ISO200
	배기구		NW40	NW40	NW40	NW40	NW40	NW40	NW40	NW40	NW40
도달 압력 시 전력 개략 시		kW	1.2	1.8	1.9	2.3	2.1	3.9	2.8	4.6	5.3
냉각수	유량	L/min	3~8	3~8	3.5~8	4~8	5~8	5~8	5~8	5~8	5~8
	온도	℃	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30	Max. 30
N2	유량	Pa•m3/s	26~31	26~31	26~31	26~31	28~33	228	28~33	228	34~35
전원　상/전압/주파수	200V 모델		3상/200V/50Hz 3상/200-220V/60Hz	3상/200V/50Hz 3상/200-220V/60Hz	3상/200V/50Hz 3상/200-220V/60Hz	3상/200V/50Hz 3상/200-220V/60Hz	3상/200V/50Hz 3상/200-220V/60Hz	3상/200V/50Hz 3상/200-220V/60Hz	3상/200V/50Hz 3상/200-220V/60Hz	3상/200V/50Hz 3상/200-220V/60Hz	3상/200V/50Hz 3상/200-220V/60Hz
	400V 모델		3상/380-400V/50Hz 3상/380-440V/60Hz	3상/380-400V/50Hz 3상/380-440V/60Hz	3상/380-400V/50Hz 3상/380-440V/60Hz	3상/380-400V/50Hz 3상/380-440V/60Hz	3상/380-400V/50Hz 3상/380-440V/60Hz	-	3상/380-400V/50Hz 3상/380-440V/60Hz	3상/380-400V/50Hz 3상/380-440V/60Hz	3상/380-400V/50Hz 3상/380-440V/60Hz
전원 용량		kVA	3.3	5.4	6.0	6.8	7.1	15.7	8.3	19.4	14.2
개략 질량		kg	170	320	360	400	500	580	740	820	870