Model	Unit	G6 A1~A4	G6 P1~P4
Abatement method		burn+ wet	burn+ wet
Max. inflow gas volume	L/min	1,200 x 1,900 x 2,300	1,200 x 1,900 x 2,300
Fuel		City gas	Propane gas
Dimensions	W x D x H mm	1,200 x 1,900 x 2,300	1,200 x 1,900 x 2,300
Gases (e.g.)		Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc.	Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc.
Standard equipment		Large flow-rate NF3 abatement burner	Large flow-rate NF3 abatement burner